ESCO-TDS1200II IR PKG (TDS-linked type) Gas Analyzer for Airtight Sealed Packages
ESCO-TDS1200II IR PKG (TDS-Connected Type)Features
This system is equipped with IVA functionality connected to the ESCO-TDS1200II IR main unit.
The IVA* function enables the measurement of various gases, including water vapor, inside microdevices encapsulated in ceramics, metals, or glass.
Primary targets include electronic devices such as compound semiconductors, laser diodes, crystal oscillators, and SAW filters, as well as various types of lamps.
The gas detection unit uses the same module as the ESCO-TDS1200II IR.
For example, it can support a series of processes such as evaluating thin-film materials used in the front-end semiconductor manufacturing process with the TDS function and analyzing gases inside devices packaged in the back-end process with the IVA function.
IVA: Internal Vapor Analysis
