Overhaul
We accept requests for maintenance and overhauls from customers who have installed our equipment. Please refer to the items below.
No.001 Preliminary investigation
| Implementation period | Every year |
|---|---|
| Standard Work Time | 4.0H |
| Parts for Use and Replacement | Complete set of check samples |
| Notes | Perform a status check on the equipment. |
No.002 Infrared Lamp Replacement
| Implementation period | Every year |
|---|---|
| Standard Work Time | 0.5H |
| Parts for Use and Replacement | Infrared lamp [1] |
| Notes | The components used vary depending on the device specifications. |
No.003 Replacement of the Fore-line Trap Element
| Implementation period | Every year |
|---|---|
| Standard Work Time | 0.5H |
| Parts for Use and Replacement | Element: 20-H026-00-050 [1 can] |
| Notes | The components used vary depending on the device specifications. |
No.004 Rotary Pump Oil Change
| Implementation period | every six months |
|---|---|
| Standard Work Time | 2.0H |
| Parts for Use and Replacement | Rotary Pump Oil |
| Notes | The components used vary depending on the device specifications and manufacturer. |
No.005 Heated Sample Stage Replacement
| Implementation period | Every year |
|---|---|
| Standard Work Time | 2.0H |
| Parts for Use and Replacement | Quartz stage, thermocouple, ICF gasket |
| Notes | The components used vary depending on the device specifications. |
No.006 Cleaning inside the heating chamber
| Implementation period | Implementation period |
|---|---|
| Standard Work Time | 0.5H |
| Parts for Use and Replacement | ICF gasket |
No.007 Cleaning inside the load lock chamber
| Implementation period | Every two years |
|---|---|
| Standard Work Time | 3.0H |
| Parts for Use and Replacement | ICF gasket |
No.008 Sample Transfer Mechanism Leaf Spring Replacement
| Implementation period | Every two years |
|---|---|
| Standard Work Time | 1.0H |
| Parts for Use and Replacement | Leaf spring, gasket |
No.009 Infrared Guidance Mechanism Polishing
| Implementation period | Every two years (depending on the contamination status of the mechanical components) |
|---|---|
| Standard Work Time | 1.0H |
| Parts for Use and Replacement | Gasket |
No.010 TMP（2）Bearing Replacement
| Implementation period | Every three years |
|---|---|
| Standard Work Time | 3.0H |
| Parts for Use and Replacement | Bearings, gaskets |
| Notes | The components used vary depending on the device specifications. |
No.011 Oil Mist Filter Replacement
| Implementation period | Every four years (depending on contamination levels) |
|---|---|
| Standard Work Time | 0.5H |
| Parts for Use and Replacement | Filter |
No.012 Gate Valve Replacement
| Implementation period | Every four years |
|---|---|
| Standard Work Time | 4.0H |
| Parts for Use and Replacement | Gate valve, gasket |
| Notes | Depends on the frequency of device usage. |
No.013 Rotary Pump Replacement
| Implementation period | Every five years |
|---|---|
| Standard Work Time | 2.0H |
| Parts for Use and Replacement | Rotary pump, anti-vibration rubber |
No.014 QMS Resolution and Mass Axis Adjustment
| Implementation period | Every year |
|---|---|
| Standard Work Time | 2.0H |
| Parts for Use and Replacement | Calibration Standard Gas |
No.015 QMS Ion Source Replacement
| Implementation period | Every two years (depending on contamination levels) |
|---|---|
| Standard Work Time | 2.0H |
| Parts for Use and Replacement | Ion source, gasket |
No.016 Vacuum Start-Up and Baking Set
| Implementation period | Every year |
|---|---|
| Standard Work Time | 2.0H |
No.017 Performance verification after overhaul
| Implementation period | Every year |
|---|---|
| Standard Work Time | 5.0H |
| Parts for Use and Replacement | Complete set of check samples |
| Notes | Maintenance will always be performed. |
No.018 Measurement for QMS Calibration Curves
| Implementation period | Every month |
|---|---|
| Standard Work Time | 1.0H |
| Parts for Use and Replacement | Ion-implanted wafer |
| Notes | Perform after baking for at least one day. |
No.019 Measurement for QMS Characteristic Correction
| Implementation period | Every year |
|---|---|
| Standard Work Time | 3.0H |
| Parts for Use and Replacement | Ion-implanted wafers (various types) |
| Notes | Perform after baking for at least one day. |
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If you have any questions or concerns about our products,
please feel free to contact us using the inquiry form below.
